Patent Assignment
Reel/Frame 016830/0535
Assignment of Assignor's Interest
Recorded: 2005-08-02
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Delivery Position Aligning Method for Use in a Transfer System and a Processing System Employing the Method