Patent Assignment
Reel/Frame 016875/0851
Assignment of Assignor's Interest
Recorded: 2005-08-15
Pages: 2
Assignors
YOSHIDA, ATSUSHI
Executed: 2005-06-30
FUJIMOTO, KOTARO
Executed: 2005-06-30
SHIMADA, TAKESHI
Executed: 2005-07-02
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHIMBASHI, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Method of Cleaning Etching Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.