Patent Assignment
Reel/Frame 016881/0068
Assignment of Assignor's Interest
Recorded: 2005-08-09
Pages: 4
Assignors
WAGNER, CHRISTIAN
Executed: 2005-08-05
DE BOEIJ, WILHELMUS PETRUS
Executed: 2005-08-05
HEIL, TILMANN
Executed: 2005-08-05
FIOLKA, DAMIAN
Executed: 2005-08-05
DE JONGE, ROEL
Executed: 2005-08-05
Assignees
ASML NETHERLAND B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
CARL ZEISS SMT AG
CARL ZEISS STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Polarized Radiation in Lithographic Apparatus and Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.