Patent Assignment
Reel/Frame 016882/0265
Assignment of Assignor's Interest
Recorded: 2005-12-12
Pages: 3
Assignors
OZAKI, TAKASHI
Executed: 2005-05-10
TANIYAMA, TOMOSHI
Executed: 2005-03-29
UNAMI, HIROSHI
Executed: 2005-03-29
MAEDA, KIYOHIKO
Executed: 2005-03-29
MORITA, SHINYA
Executed: 2005-03-17
TAKASHIMA, YOSHIKAZU
Executed: 2005-03-17
HISAKADO, SADAO
Executed: 2005-03-30
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, HIGASHI-NAKANO 3-CHOME, NAKANO-KU,, TOKYO, 164-8511, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method for Manufacturing a Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.