Patent Assignment
Reel/Frame 016894/0315
Assignment of Assignor's Interest
Recorded: 2005-08-15
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Evaluation Method and Fabrication Method of Optical Element Having Multilayer Film, Exposure Apparatus Having the Multilayer Film, and Device Fabrication Method