Patent Assignment
Reel/Frame 016896/0630
Assignment of Assignor's Interest
Recorded: 2005-08-16
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Vacuum Apparatus Including a Particle Monitoring Unit, Particle Monitoring Method and Program, and Window Member for Use in the Particle Monitoring