Patent Assignment
Reel/Frame 016906/0052
Assignment of Assignor's Interest
Recorded: 2005-12-16
Pages: 6
Assignors
KIRCHNER, ANDREAS
Executed: 2005-10-13
MANN, HANS-JUERGEN
Executed: 2005-10-17
KNEER, BERNARD
Executed: 2005-12-05
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for Correcting Astigmatism in a Microlithography Projection Exposure Apparatus, a Projection Objective of Such a Projection Exposure Apparatus, and a Fabrication Method for Micropatterned Components
Patent:
7,522,260 →
Application:
11/239,266 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.