Patent Assignment
Reel/Frame 016909/0710
Assignment of Assignor's Interest
Recorded: 2005-08-22
Pages: 3
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
System and Method Detecting Malfunction of Pad Conditioner in Polishing Apparatus