Patent Assignment
Reel/Frame 016919/0099
Assignment of Assignor's Interest
Recorded: 2005-03-04
Pages: 3
Assignor
SATO, HIDEAKI
Executed: 2005-02-24
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Rotation Drive Device and Rotation Drive Method