Patent Assignment
Reel/Frame 016919/0572
Assignment of Assignor's Interest
Recorded: 2005-08-25
Pages: 10
Assignors
SINGER, WOLFGANG
Executed: 2005-07-18
ANTONI, MARTIN
Executed: 2005-07-14
WANGLER, JOHANNES
Executed: 2005-07-08
WEISS, MARKUS
Executed: 2005-07-13
BANINE, VADIM YEVGENYEVICH
Executed: 2005-07-18
DIERICHS, MARCEL
Executed: 2005-07-18
MOORS, ROEL
Executed: 2005-07-18
SCHUSTER, KARL-HEINZ
Executed: 2005-07-05
SCHOLZ, AXEL
Executed: 2005-07-08
BOSSELMANN, PHILIPP
Executed: 2005-07-11
WARM, BERND
Executed: 2005-07-11
Assignees
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN 73447, GERMANY
ASML NETHERLANDS
DE RUM 6501, VELDHOVEN 5504 DR, NETHERLANDS
Covered Property
(1)
Illumination System for a Wavelength of Less Than or Equal to 193 Nm, with Sensors for Determining an Illumination
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.