Patent Assignment
Reel/Frame 016950/0416
Assignment of Assignor's Interest
Recorded: 2005-10-27
Pages: 4
Assignors
CHEYMOL, GUY
Executed: 2005-10-03
CORMONT, PHILIPPE
Executed: 2005-10-03
THRO, PIERRE-YVES
Executed: 2005-10-03
SUBLEMONTIER, OLIVIER
Executed: 2005-10-03
SCHMIDT, MARTIN
Executed: 2005-10-03
BARTHOD, BENOIT
Executed: 2005-10-03
Assignees
COMMISSARIAT ENERGIE ATOMIQUE
31-33 RUE DE LA FEDERATION, 75015 PARIS, FRANCE
ALCATEL VACUUM TECHNOLOGY FRANCE
12 RUE DE LA BAUME, 75008 PARIS, FRANCE
Covered Property
(1)
Apparatus for Generating Light in the Extreme Ultraviolet and Use in a Light Source for Extreme Ultraviolet Lithography