Patent Assignment
Reel/Frame 016951/0086
Assignment of Assignor's Interest
Recorded: 2005-10-27
Pages: 3
Assignor
KUMAR, AJAY
Executed: 2005-09-21
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUNSEL, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Cluster Tool and Method for Process Integration in Manufacturing of a Photomask