Patent Assignment
Reel/Frame 016953/0127
Assignment of Assignor's Interest
Recorded: 2005-09-07
Pages: 3
Assignors
HOSODA, MASAKI
Executed: 2005-08-04
MURAKI, MASATO
Executed: 2005-08-05
KAMIMURA, OSAMU
Executed: 2005-08-22
Assignees
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Exposure Apparatus, Charged Particle Beam Exposure Method and Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.