Patent Assignment
Reel/Frame 016956/0489
Assignment of Assignor's Interest
Recorded: 2005-08-31
Pages: 3
Assignee
APPLIED MATERIALS, INC.
P.O. BOX BOX 450-A, PATNET COUNSEL, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Integrated Metrology Tools for Monitoring and Controlling Large Area Substrate Processing Chambers