Patent Assignment
Reel/Frame 016966/0260
Assignment of Assignor's Interest
Recorded: 2005-09-07
Pages: 3
Assignors
TANO, HIROYUKI
Executed: 2005-08-26
NISHIMURA, HIDEKI
Executed: 2005-08-26
SHIHO, HIROSHI
Executed: 2005-08-26
Assignee
JSR CORPORATION
6-10, TSUKIJI 5-CHOME, CHUO-KU, TOKYO, JAPAN
Covered Property
(1)
Chemical Mechanical Polishing Pad and Chemical Mechanical Polishing Process