Patent Assignment
Reel/Frame 016970/0401
Assignment of Assignor's Interest
Recorded: 2005-09-09
Pages: 2
Assignors
YOKOGAWA, KENETSU
Executed: 2005-08-08
MAEDA, KENJI
Executed: 2005-08-09
IZAWA, MASARU
Executed: 2005-08-08
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI, 1-CHOME MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.