Patent Assignment
Reel/Frame 016984/0598
Assignment of Assignor's Interest
Recorded: 2005-11-07
Pages: 3
Assignor
CERIO, JR., FRANK M.
Executed: 2005-10-31
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method and Apparatus for a Metallic Dry-Filling Process