Patent Assignment
Reel/Frame 016998/0360
Assignment of Assignor's Interest
Recorded: 2005-09-14
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Removing Particles
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.