Patent Assignment
Reel/Frame 017000/0569
Assignment of Assignor's Interest
Recorded: 2005-09-16
Pages: 5
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Beam Delivery System for Laser Dark-Field Illumination in a Catadioptric Optical System