Patent Assignment
Reel/Frame 017009/0042
Assignment of Assignor's Interest
Recorded: 2006-01-12
Pages: 6
Assignors
TOTZECK, MICHAEL
Executed: 2005-11-11
FUERTER, GERHART
Executed: 2005-11-16
DITTMANN, OLAF
Executed: 2005-11-11
SCHUSTER, KARL-HEINZ
Executed: 2005-11-10
SHAFER, DAVID
Executed: 2005-11-14
BEDER, SUSANNE
Executed: 2005-11-09
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Arrangement of Optical Elements in a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.