Patent Assignment
Reel/Frame 017017/0036
Assignment of Assignor's Interest
Recorded: 2005-11-14
Pages: 3
Assignor
HILL, HENRY A.
Executed: 2005-10-18
Assignee
ZETETIC INSTITUTE
1665 E. 18TH STREET, SUITE 206, TUCSON, ARIZONA, 85719
Covered Property
(1)
Sub-Nanometer Overlay, Critical Dimension, and Lithography Tool Projection Optic Metrology Systems Based on Measurement of Exposure Induced Changes in Photoresist on Wafers