Patent Assignment
Reel/Frame 017029/0218
Assignment of Assignor's Interest
Recorded: 2005-09-27
Pages: 3
Assignors
SAKURAI, KUNIHIKO
Executed: 2005-09-02
TOGAWA, TETSUJI
Executed: 2005-09-02
MOCHIZUKI, YOSHIHIRO
Executed: 2005-09-02
FUKUDA, AKIRA
Executed: 2005-09-02
HIYAMA, HIROKUNI
Executed: 2005-09-02
HIROKAWA, KAZUTO
Executed: 2005-09-02
TSUJIMURA, MANABU
Executed: 2005-09-02
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Estimating Polishing Profile or Polishing Amount, Polishing Method and Polishing Apparatus