Patent Assignment
Reel/Frame 017033/0949
Assignment of Assignor's Interest
Recorded: 2005-09-28
Pages: 5
Assignors
MACK, MICHAEL A.
Executed: 2005-04-27
BECKER, ROBERT K.
Executed: 2005-04-27
GWINN, MATTHEW C.
Executed: 2005-04-27
Assignee
EPION CORPORATION
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Method and Apparatus for Improved Beam Stability in High Current Gas-Cluster Ion Beam Processing System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.