Patent Assignment
Reel/Frame 017036/0556
Assignment of Assignor's Interest
Recorded: 2005-09-28
Pages: 2
Assignors
EMER, WOLFGANG
Executed: 2005-08-25
SCHELLHORN, UWE
Executed: 2005-09-09
DAHL, MANFRED
Executed: 2005-08-31
HOCH, RAINER
Executed: 2005-08-25
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for Determining Distortion and/or Image Surface
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.