Patent Assignment
Reel/Frame 017053/0911
Assignment of Assignor's Interest
Recorded: 2005-09-26
Pages: 3
Assignors
BIRANG, MANOOCHER
Executed: 2002-04-15
SWEDEK, BOGDAN
Executed: 2002-04-11
KIM, HYEONG-CHEOL
Executed: 2002-04-11
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus of Eddy Current Monitoring for Chemical Mechanical Polishing