Patent Assignment
Reel/Frame 017068/0813
Assignment of Assignor's Interest
Recorded: 2005-10-07
Pages: 4
Assignors
HASEBE, KAZUHIDE
Executed: 2005-08-30
NODERA, NOBUTAKE
Executed: 2005-08-30
ENDO, ATSUSHI
Executed: 2005-08-30
UMEKI, MAKOTO
Executed: 2005-08-30
NISHIMURA, KATSUMI
Executed: 2005-09-02
MINAMI, MASAKAZU
Executed: 2005-09-02
YOSHIDA, MAKOTO
Executed: 2005-09-02
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
HORIBA LTD.
2, MIYANOHIGASHI-CHO, KISSHOIN, MINAMI-KU, KYOTO, JAPAN
Covered Property
(1)
Film Formation Apparatus and Method of Using the Same