Assignment of Assignor's Interest

Recorded: 2005-10-05 Pages: 2

Assignor

WEGMANN, ULRICH

Executed: 2005-09-21

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Method and Apparatus for Determining Telecentricity and Microlithography Projection Exposure Apparatus

Patent: 7,365,861 →

Application: 11/144,748 →

Publication: US 2006/0012799

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.