Patent Assignment
Reel/Frame 017075/0609
Assignment of Assignor's Interest
Recorded: 2005-10-12
Pages: 3
Assignors
NAKASUJI, MAMORU
Executed: 2005-09-06
NOJI, NOBUHARU
Executed: 2005-09-06
SATAKE, TOHRU
Executed: 2005-09-06
MURAKAMI, TAKESHI
Executed: 2005-09-06
SOBUKAWA, HIROSI
Executed: 2005-09-06
KAGA, TORU
Executed: 2005-09-06
HATAKEYAMA, MASAHIRO
Executed: 2005-09-06
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Electron Beam Apparatus and a Device Manufacturing Method Using the Same Apparatus