Assignment of Assignor's Interest

Recorded: 2005-12-08 Pages: 3

Assignors

KAMENOV, VLADIMIR

Executed: 2005-11-14

GRUNER, TORALF

Executed: 2005-11-08

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Optical System and Photolithography Tool Comprising Same

Patent: 7,355,791 →

Application: 11/251,300 →

Publication: US 2006/0066764

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.