Patent Assignment
Reel/Frame 017152/0984
Assignment of Assignor's Interest
Recorded: 2005-10-27
Pages: 2
Assignors
KAGA, HIROYASU
Executed: 2005-10-12
SUZUKI, HIROYUKI
Executed: 2005-10-12
HOJYO, YUTAKA
Executed: 2005-10-12
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Wafer Alignment Method for Dual Beam System