Patent Assignment
Reel/Frame 017168/0018
Assignment of Assignor's Interest
Recorded: 2005-10-31
Pages: 3
Assignor
SUGAWARA, TAKUYA
Executed: 2005-10-31
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method for Forming a Nitrided Germanium-Containing Layer Using Plasma Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.