Patent Assignment
Reel/Frame 017180/0906
Assignment of Assignor's Interest
Recorded: 2005-10-31
Pages: 5
Assignors
MUI, DAVID
Executed: 2003-07-07
LIU, WEI
Executed: 2003-07-01
SASANO, HIROKI
Executed: 2003-07-07
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUSEL, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Apparatus for Controlling Etch Processes During Fabrication of Semiconductor Devices