Patent Assignment
Reel/Frame 017181/0727
Assignment of Assignor's Interest
Recorded: 2005-11-03
Pages: 4
Assignors
KOSHIISHI, AKIRA
Executed: 2005-10-20
SUGIMOTO, MASARU
Executed: 2005-10-20
HINATA, KUNIHIKO
Executed: 2005-10-20
KOBAYASHI, NORIYUKI
Executed: 2005-10-20
KOSHIMIZU, CHISHIO
Executed: 2005-10-20
OHTANI, RYUJI
Executed: 2005-10-20
KIBI, KAZUO
Executed: 2005-10-20
SAITO, MASASHI
Executed: 2005-10-20
MATSUMOTO, NAOKI
Executed: 2005-10-20
IWATA, MANABU
Executed: 2005-10-20
YANO, DAISUKE
Executed: 2005-10-26
YAMAZAWA, YOHEI
Executed: 2005-10-20
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method