Patent Assignment
Reel/Frame 017185/0045
Assignment of Assignor's Interest
Recorded: 2005-06-17
Pages: 3
Assignors
KIMURA, TORU
Executed: 2005-06-01
NARUSHIMA, HIROSHI
Executed: 2005-06-03
HIROKI, TSUTOMU
Executed: 2005-06-03
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
NHK SPRING CO., LTD.
3-10, FUKUURA, KANAZAWA-KU, YOKOHAMA-SHI, KANAGAWA 236-0004, JAPAN
Covered Property
(1)
Vacuum Container Apparatus Used for Manufacturing Semiconductor Devices and Lid Apparatus for Same