Patent Assignment
Reel/Frame 017185/0303
Assignment of Assignor's Interest
Recorded: 2005-11-04
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, BLDG. CA-1, FREMONT, CALIFORNIA, 94538-6470
Covered Property
(1)
Method and Apparatus for Chuck Thermal Calibration
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.