Patent Assignment
Reel/Frame 017187/0447
Assignment of Assignor's Interest
Recorded: 2005-11-01
Pages: 3
Assignee
SILICON LIGHT MACHINES CORPORATION
385 MOFFETT PARK DRIVE, SUITE 115, SUNNYVALE, CALIFORNIA, 94089
Covered Property
(1)
Dielectric Spacer for Enhanced Squeeze-Film Damping of Movable Members of Mems Devices