Patent Assignment
Reel/Frame 017220/0800
Assignment of Assignor's Interest
Recorded: 2005-11-16
Pages: 3
Assignors
BENESCH, NORBERT
Executed: 2001-07-12
SCHNEIDER, CLAUS
Executed: 2001-07-12
PFITZNER, LOTHAR
Executed: 2001-07-12
Assignees
SEMICONDUCTOR 300 GMBH & CO. KG
MANFRED VON ARDENNE-RING 20, DRESDEN, 01099, GERMANY
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
LEONRODTSTRASSE 54, MUNCHEN, 80636, GERMANY
Covered Property
(1)
Method and Device for Optically Monitoring Fabrication Processes of Finely Structured Surfaces in a Semiconductor Production
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.