Patent Assignment
Reel/Frame 017220/0805
Assignment of Assignor's Interest
Recorded: 2005-11-14
Pages: 2
Assignor
BROTSACK, MARKUS
Executed: 2005-10-02
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.