Patent Assignment
Reel/Frame 017221/0726
Assignment of Assignor's Interest
Recorded: 2005-11-10
Pages: 3
Assignors
FURUYA, HAJIME
Executed: 2005-11-02
TANAKA, HIDEKI
Executed: 2005-11-02
OKUBO, TOMOYA
Executed: 2005-11-02
KOBAYASHI, RYOKO
Executed: 2005-11-09
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method of Resetting Substrate Processing Apparatus, Storage Medium Storing Program for Implementing the Method, and Substrate Processing Apparatus