Patent Assignment
Reel/Frame 017222/0352
Assignment of Assignor's Interest
Recorded: 2005-11-16
Pages: 3
Assignors
TANAKA, KOICHIRO
Executed: 2005-11-09
YAMAMOTO, YOSHIAKI
Executed: 2005-11-09
OMATA, TAKATSUGU
Executed: 2005-11-09
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Laser Treatment Apparatus, Laser Treatment Method, and Manufacturing Method of Semiconductor Device