Patent Assignment
Reel/Frame 017270/0865
Assignment of Assignor's Interest
Recorded: 2005-12-02
Pages: 5
Assignors
WEISS, MARKUS
Executed: 2005-05-09
SINGER, WOLFGANG
Executed: 2005-05-13
KLEEMAN, BERND
Executed: 2005-05-23
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System with a Grating Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.