Patent Assignment
Reel/Frame 017284/0174
Assignment of Assignor's Interest
Recorded: 2006-02-07
Pages: 3
Assignors
KILPELA, OLLI V.
Executed: 2006-01-04
KOH, WONYONG
Executed: 2005-12-14
HUOTARI, HANNU A.
Executed: 2006-01-03
TUOMINEN, MARKO
Executed: 2006-01-03
LEINIKKA, MIIKA
Executed: 2006-01-25
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Selective Formation of Metal Layers in an Integrated Circuit