Patent Assignment
Reel/Frame 017302/0970
Assignment of Assignor's Interest
Recorded: 2004-12-03
Pages: 2
Assignor
PUECH, MICHEL
Executed: 2004-10-18
Assignee
ALCATEL
54, RUE LA BOETIE, 75008 PARIS, FRANCE
Covered Property
(1)
Method and device for substrate etching with very high power inductively coupled plasma
Application:
10/516,455 →
Publication:
US 2006/0060566
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.