IP Library Assignment 017302/0970
Patent Assignment
Reel/Frame 017302/0970

Assignment of Assignor's Interest

Recorded: 2004-12-03 Pages: 2
Assignor
PUECH, MICHEL
Executed: 2004-10-18
Assignee
ALCATEL
54, RUE LA BOETIE, 75008 PARIS, FRANCE
Covered Property (1)
Method and device for substrate etching with very high power inductively coupled plasma
Application: 10/516,455 →
Publication: US 2006/0060566
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Nov 10, 2008
From: ALCATEL LUCENT
To: TEGAL CORPORATION
Reel/Frame 021805/0378 →
Change of Name Dec 15, 2008
From: ALCATEL
To: ALCATEL LUCENT
Reel/Frame 021976/0763 →