Patent Assignment
Reel/Frame 021805/0378
Assignment of Assignor's Interest
Recorded: 2008-11-10
Pages: 8
Assignor
ALCATEL LUCENT
Executed: 2008-09-16
Assignee
TEGAL CORPORATION
2201 S. MCDOWELL BOULEVARD, PETALUMA, CALIFORNIA, 94954
Covered Properties
(9)
Plasma Vacuum Substrate Treatment Process and System
Patent:
6,431,113 →
Application:
09/634,988 →
Method and device for substrate etching with very high power inductively coupled plasma
Application:
10/516,455 →
Publication:
US 2006/0060566
Heating jacket for plasma etching reactor, and etching method using same
Application:
10/516,457 →
Publication:
US 2005/0224178
Method and Apparatus for Non-Aggressive Plasma-Enhanced Vapor Deposition of Dielectric Films
Thin substrate support
Application:
11/219,651 →
Publication:
US 2006/0051893
Apparatus and a Method for Controlling the Depth of Etching During Alternating Plasma Etching of Semiconductor Substrates
Method and apparatus for non-aggressive plasma-enhanced vapor deposition of dielectric films
Application:
11/372,118 →
Publication:
US 2006/0189165
Method of Controlling the Pressure in a Process Chamber
Anisotropic Etching Method
Application:
11/669,028 →
Publication:
US 2007/0197039
Related Assignments
(13)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 8, 2000
From: PUECH, MICHEL
To: ALCATEL
Reel/Frame 011062/0301 →
Assignment of Assignor's Interest
Jul 30, 2004
From: JANY, CHRISTOPHE; PUECH, MICHEL
To: ALCATEL
Reel/Frame 015645/0925 →
Assignment of Assignor's Interest
Dec 3, 2004
From: PUECH, MICHEL
To: ALCATEL
Reel/Frame 016695/0650 →
Assignment of Assignor's Interest
Dec 3, 2004
From: PUECH, MICHEL
To: ALCATEL
Reel/Frame 017302/0970 →
Assignment of Assignor's Interest
Nov 4, 2005
From: PUECH, MICHEL; GUICHENAL, XAVIER
To: ALCATEL
Reel/Frame 017188/0708 →
Assignment of Assignor's Interest
Apr 25, 2006
From: PUECH, MICHEL; LAUNAY, NICOLAS
To: ALCATEL
Reel/Frame 017816/0453 →
Assignment of Assignor's Interest
Jul 11, 2006
From: LAUNAY, NICOLAS
To: ALCATEL
Reel/Frame 018089/0477 →
Assignment of Assignor's Interest
Apr 23, 2007
From: PUECH, MICHEL
To: ALCATEL LUCENT
Reel/Frame 019191/0930 →
Change of Name
Dec 15, 2008
From: ALCATEL
To: ALCATEL LUCENT
Reel/Frame 021976/0763 →
Assignment of Assignor's Interest
Nov 16, 2012
From: TEGAL CORPORATION
To: SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
Reel/Frame 029309/0193 →
Change of Name
Dec 5, 2012
From: SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
To: SPTS TECHNOLOGIES LIMITED
Reel/Frame 029405/0169 →
Security Interest
Apr 2, 2015
From: SPTS TECHNOLOGIES LIMITED
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 035364/0295 →
Release of Security Interest
Jul 5, 2016
From: JPMORGAN CHASE BANK, N.A.
To: SPTS TECHNOLOGIES LIMITED
Reel/Frame 039257/0026 →