Patent Assignment
Reel/Frame 017306/0560
Assignment of Assignor's Interest
Recorded: 2005-11-29
Pages: 5
Assignors
SHEU, YI-MING
Executed: 2003-05-13
LIN, DA-WEN
Executed: 2003-05-13
CHEN, CHENG-KU
Executed: 2003-05-13
YEH, PO-YING
Executed: 2003-05-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C. 300-77, TAIWAN
Covered Property
(1)
Narrow Width Effect Improvement with Photoresist Plug Process and Sti Corner Ion Implantation