IP Library › Assignment 017323/0142
Patent Assignment
Reel/Frame 017323/0142

ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2005-08-15 Received: 2005-12-12 Pages: 2
Assignors
HAUF, MARKUS
Executed: 2005-07-01
MERKL, CHRISTOPH
Executed: 2005-07-01
STRIEBEL, CHRISTOPH
Executed: 2005-07-01
Assignee
MATTSON THERMAL PRODUCTS
DAIMLERSTRASSE 10, DORNSTADT, DEX, D-89160, GERMANY
Covered Application (1)
PROCESS FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTOR WAFER IN A RAPID HEATING UNIT
App. No. 10/540,613
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