Granted Patent
Utility
PCT National Stage
US 7,412,299
· Confirmation No. 2062
PROCESS FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTOR WAFER IN A RAPID HEATING UNIT
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-10-16 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2015-09-03 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2008-07-23 | ISSUE.NTF |
Issue Notification | 1 | View | |
| 2008-07-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2008-07-03 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-07-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-07-03 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2008-04-29 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2008-04-03 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 8 | View | |
| 2008-04-03 | FWCLM |
Index of Claims | 3 | View | |
| 2008-04-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2008-04-03 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2008-04-03 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2008-04-03 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2008-04-03 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2008-02-19 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2008-02-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2008-02-19 | SPEC |
Specification | 2 | View | |
| 2008-02-19 | CLM |
Claims | 6 | View | |
| 2008-02-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2008-02-19 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2008-02-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-02-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-11-16 | CTNF |
Non-Final Rejection | 13 | View | |
| 2007-11-16 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2007-11-16 | 892 |
List of references cited by examiner | 1 | View | |
| 2007-11-16 | FWCLM |
Index of Claims | 3 | View | |
| 2007-11-16 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2007-11-09 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2007-11-09 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2007-08-16 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 2 | View | |
| 2007-06-04 | PA.. |
Power of Attorney | 8 | View | |
| 2006-02-08 | M903 |
Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed | 2 | View | |
| 2005-08-15 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2005-08-15 | OATH |
Oath or Declaration filed | 2 | View | |
| 2005-07-18 | A.PE |
Preliminary Amendment | 1 | View | |
| 2005-07-18 | SPEC |
Specification | 2 | View | |
| 2005-07-18 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2005-07-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2005-07-18 | FOR |
Foreign Reference | 28 | View | |
| 2005-07-18 | FOR |
Foreign Reference | 12 | View | |
| 2005-07-18 | FOR |
Foreign Reference | 18 | View | |
| 2005-07-18 | FOR |
Foreign Reference | 34 | View | |
| 2005-06-23 | TRNA |
Transmittal of New Application | 2 | View | |
| 2005-06-23 | SPEC |
Specification | 52 | View | |
| 2005-06-23 | CLM |
Claims | 13 | View | |
| 2005-06-23 | ABST |
Abstract | 1 | View | |
| 2005-06-23 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2005-06-23 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2005-06-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-06-23 | A.PE |
Preliminary Amendment | 1 | View | |
| 2005-06-23 | SPEC |
Specification | 1 | View | |
| 2005-06-23 | CLM |
Claims | 7 | View | |
| 2005-06-23 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2005-06-23 | FRPR |
Certified Copy of Foreign Priority Application | 38 | View | |
| 2005-06-23 | FRPR |
Certified Copy of Foreign Priority Application | 53 | View | |
| 2005-06-23 | 371P |
Documents submitted with 371 (National Stage) Applications | 13 | View | |
| 2005-06-23 | 371P |
Documents submitted with 371 (National Stage) Applications | 4 | View | |
| 2005-06-23 | 371P |
Documents submitted with 371 (National Stage) Applications | 57 | View | |
| 2005-06-23 | IMIS |
Miscellaneous Internal Document | 1 | View | |
| 2005-06-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-06-23 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Markus Hauf
Ichenhausen, GERMANY
Christoph Merkl
Weidenweg, GERMANY
Christoph Striebel
Dornstadt, GERMANY
Attorneys & Agents of Record
Classification
USPC
700/121
H10P95/90
H10P72/0602
H10P72/0436
G01J5/00
G01J5/0003
Prosecution
- Examiner
- JARRETT, RYAN A
- Art Unit
- 2121
- Docket No.
- AGXG-35-PCT-US
- Confirmation No.
- 2062
Foreign Priority
102 60 673.0
·
2002-12-23
·
GERMANY
103 29 107.5
·
2003-06-27
·
GERMANY
Publication
- Pub. No.
- US20060100735A1
- Pub. Date
- 2006-05-11
Patent Term Adjustment
-3days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-02-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-02-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-09-30
CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT NUMBER 7037797 PREVIOUSLY RECORDED AT REEL: 045763 FRAME: 0296. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Recorded 2018-05-14
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-03-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-08-15
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Quick Facts
- Patent No.
- US 7,412,299
- App. No.
- 10/540,613
- Filed
- 2005-08-15
- Effective Filing
- 2005-06-23
- Granted
- 2008-08-12
- Pub. No.
- US20060100735A1
- Examiner
- JARRETT, RYAN A
- Art Unit
- 2121
- PTA
- -3 days
External Links