Patent Assignment
Reel/Frame 045763/0296
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded: 2018-03-29
Received: 2018-03-29
Pages: 25
Assignor
MATTSON THERMAL PRODUCTS GMBH
Executed: 2003-12-31
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Applications
(18)
APPARATUS FOR THERMALLY TREATING SEMICONDUCTOR SUBSTRATES
App. No. 12/251,916
→
PROCESS FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTOR WAFER IN A RAPID HEATING UNIT
App. No. 10/540,613
→
DEVICE AND METHOD FOR THERMALLY TREATING SEMICONDUCTOR WAFERS
App. No. 10/524,871
→
METHOD AND APPARATUS FOR THERMALLY TREATING DISK-SHAPED SUBSTRATES
App. No. 10/540,614
→
METHOD OF PRODUCING A CALIBRATION WAFER
App. No. 10/536,788
→
APPARATUS AND METHOD FOR MEASURING THE TEMPERATURE OF SUBSTRATES
App. No. 11/021,915
→
METHOD AND DEVICE FOR THERMAL TREATMENT OF SUBSTRATES
App. No. 10/478,754
→
METHOD FOR THERMALLY TREATING A SUBSTRATE THAT COMPRISES SEVERAL LAYERS
App. No. 10/487,573
→
Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment
App. No. 10/476,136
→
METHOD FOR MINIMIZING THE VAPOR DEPOSITION OF TUNGSTEN OXIDE DURING THE SELECTIVE SIDE WALL OXIDATION OF TUNGSTEN-SILICON GATES
App. No. 10/694,593
→
DEVICE FOR THERMAL TREATMENT OF SUBSTRATES
App. No. 10/182,594
→
ADJUSTING OF DEFECT PROFILES IN CRYSTAL OR CRYSTALLINE-LIKE STRUCTURES
App. No. 10/276,767
→
METHOD FOR THE REMOVING OF ADSORBED MOLECULES FROM A CHAMBER
App. No. 10/220,001
→
METHOD AND APPARATUS FOR THE THERMAL TREATMENT OF SUBSTRATES
App. No. 10/111,737
→
Apparatus and Method for the Thermal Treatment of Substrates
App. No. 09/979,646
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DEVICE AND METHOD FOR MEASURING THE TEMPERATURE OF SUBSTRATES
App. No. 09/913,269
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METHOD AND APPARATUS FOR CALIBRATING TEMPERATURE MEASUREMENTS INDEPENDENT OF EMISSIVITY
App. No. 09/744,880
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Method of measuring electromagnetic radiation
App. No. 09/789,942
→