IP Library › Granted Patent US 7,094,637
Granted Patent Utility
US 7,094,637 · Confirmation No. 3503

METHOD FOR MINIMIZING THE VAPOR DEPOSITION OF TUNGSTEN OXIDE DURING THE SELECTIVE SIDE WALL OXIDATION OF TUNGSTEN-SILICON GATES

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Quick Facts
Patent No.
US 7,094,637
App. No.
10/694,593
Filed
2003-10-27
Granted
2006-08-22
Pub. No.
US20040121569A1
Art Unit
2823
PTA
-40 days