IP Library Assignment 017590/0492
Patent Assignment
Reel/Frame 017590/0492

ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2006-05-09 Received: 2006-05-09 Pages: 4
Assignors
KEGEL, WILHELM
Executed: 2003-10-27
STORBECK, OLAF
Executed: 2003-10-28
STADTMUELLER, MICHAEL
Executed: 2003-11-22
HAYN, REGINA
Executed: 2004-02-10
ROTERS, GEORG
Executed: 2004-02-10
SACHSE, JENS-UWE
Executed: 2004-02-10
SCHOER, ERWIN
Executed: 2004-02-10
FRIGGE, STEFFEN
Executed: 2004-02-11
Assignees
INFINEON TECHNOLOGIES AG
ST.-MARTIN-STRASSE 53, MUENCHEN, DEX, 81669, GERMANY
MATTSON THERMAL PRODUCTS GMBH
DAIMLERSTR.10, DORNSTADT, DEX, 89160, GERMANY
Covered Application (1)
METHOD FOR MINIMIZING THE VAPOR DEPOSITION OF TUNGSTEN OXIDE DURING THE SELECTIVE SIDE WALL OXIDATION OF TUNGSTEN-SILICON GATES
App. No. 10/694,593